Description:

Rarefied gasses: basic concepts and relations; diffusion,flow of rarefied gases. Flow and current of gas, conductivity. Interaction of gas with solid surface; sorption, desorption; gas transport through solid matter; evaporation, condensation;Vacuum generation: Pumping proces, Ultimative pressure, Pumping speedPumps and their properties:-Positive displacement pumps: Diaphragm, Sliding vane rotary, Diffusion, Molecular, Roots, Molecular and Turbomolecular pumps. Sorption pumps: Cryopumps, Cryo-Adsorption pumps, Sublimation and NEG pumps, Ion getter pumps..Vacuum measurements: vacuum gauges of total and partial pressure; pumping speed; gas flow, search for leaks. Materials and vacuum components and seals.Practical exercises.

Contents:

1. Basic concepts and relations of rarefied gas physics.
2. Pumping process.
3. Displacement pumps.
4. Sorption pumps.
5. Methods of vacuum measurements.
6. Materials and components of vacuum equipment.

Seminar contents:

1. Measurements with rotary vane pump.
2. Measurements with diffusion pump.
3. Measurements with cryosorption pump.
4. Turbomolecular pump and mass analysis of rest gas.
5. Methods of searching for leaks.
6. Vacuum physical vapour deposition.

Recommended literature:

Obligatory:
[1]- Z.Češpíro - Vakuová technika, skriptum ČVUT v Praze; vydavatelství ČVUT, Praha, 1977.
[2]- J.Král - Cvičení z vakuové techniky, skriptum ČVUT v Praze; Vydavatelství ČVUT, Praha,2015.
Optional
[3]- J.Groszkowski - Technika vysokého vakua, SNTL Praha, 1981.in Czech.
[4]- S.Dushman - Scientific foundation of vacuum technique, Wiley & Sons, New York, 1962.
[5]- J.F. O´Hanlon - A User´s guide to vacuum technology, Wiley - Interscience; 2003.
Equipment of practice vacuum laboratory

Keywords:

Vacuum, rarefied gasses, vacuum technology, vacuum pumps, vacuometers

Abbreviations used:

Semester:

• W ... winter semester (usually October - February)
• S ... spring semester (usually March - June)
• W,S ... both semesters

Mode of completion of the course:

• A ... Assessment (no grade is given to this course but credits are awarded. You will receive only P (Passed) of F (Failed) and number of credits)
• GA ... Graded Assessment (a grade is awarded for this course)
• EX ... Examination (a grade is awarded for this course)
• A, EX ... Examination (the award of Assessment is a precondition for taking the Examination in the given subject, a grade is awarded for this course)

Weekly load (hours per week):

• P ... lecture
• C ... seminar
• L ... laboratory
• R ... proseminar
• S ... seminar